Tools Multi-Arc Vacuum Coater (LH-)

Tools Multi-Arc Vacuum Coater can coat metal film, TiN, TiC, ZrN, CrN, Ti, Ni, Cr, Cu and other compounds film, super-hard film. Tools Multi-Arc Vacuum Coater is configuration the new target and the arc power supply, arc spot is stable. It is not easy running arc, the current is low and ion Particles is small. Applied to metal, ceramics, glass and other materials of the surface coating of hard metal film and metal compounds film. Pumping speed faster, vacuum Stability, and superior quality film, widely used in hardware, watches, glasses, tools, dies, metal, glass, ceramics, building materials, and other surface treatment industry. Dimension Φ800×H1000mm Φ1100×H1000mm Φ1250×H1500mm Φ1600×H1800mm Φ1800×H1800mm main configuration 8 multi-arc targets 10 multi-arc targets 12 multi-arc targets 20 multi-arc targets 22 multi-arc targets power source Electric-arc power, Filament power, Pulsed bias power supply Process gas control Mass flowmeter+Electromagnetic ceramic valve Vacuum chamber structure Vertical side opening door, pump system postposition, double water cooling Vacuum system Molecule pump+Root pump+Mechanical pump(5.0*105Pa) Diffusion pump+Root pump+Mechanical pump(5.0*10-4Pa) Workpiece baking temperature Normal temperature to 350 centi-degree PID control, radiation heating Workpiece motion mode Public rotation frequency control:0-20 rotation per minute Measure mode Number display comosite vacuum gause: from atmosphere to 1.0*10-5Pa Control mode Manual/Automatic/PC/PLC+HMI/PC four choice of control mode Remark we can design the dimension of the vacuum equipment according to customer’s special technique requirement.