Description : UltraScriber is a high precision laser system developed by Delphi Laser, specifically to support LED chip manufacturing. Substrates, such as Sapphire, Copper, Silicon, Cobalt as well as Alloy, can be scribed with high precision. This system has a very good quality and can achieve high throughput(10 PCS/hr) with long time reliabiltiy. UltraScriber has won much good reputation among customers, and is accepted widely in the LED industrial.
TripleScriber is another UV laser scribing system which is sepecially developed for scribing small size chips with high throughput.
Application Materials
Sapphire, Ceramic, Quartz, Diamond, Silicon as well as Copper, Cobalt, and many Alloys
Applications
LED and other wafer production industries
Features :
Features
4 Dimentional high precision adjust system for position
3 Co-Axial CCD image indentifying system
Real-time monitoring for laser power
Powerful vision system for anti-roughness on chip surface
High stability shock-proof system with granite
Process memory system
Specification : Specifications: UltraScriber / TripleScriber
Chip Size: ≥ 6 mil
Scribing Depth: 22-45 um
Beam Number: Single / Three
Rotation Stage: ± 7° With 0.0001° Res.
X-Y axis resolution: 0.1 um
Z axis resolution: 1 um
Throughput: > 10 PCS/h @ 14 mil