China ware vacuum coating equipments Intermediate frequency equipment main models and parametersparameters type 700 800 900 1000 dimension of vacuum chamber 700×1000 800×1000 900×1000 1000×1000 pumping speed 1×105Pa~3×10-3Pa≤20min limit vacuum ≤1×10-3Pa system form a complete set KT-400/2X-702X-15 KT-400/2X-702X-15 KT-500/2X-702X-15/ZLD-300 KT-500/2X-702X-15/ZLD-300 workpiece system Rotation of the planet forms(8 roating shaft, since the amount) heating methods Edge installation of stainless steel heating tube ion bombardment direct current 1000V or contravariant impulse 1000V high voltage bombardment vent system Mass flow controller control input gas Filament device Device equipped with filament assisted deposition magnetron target amount 2 2 2,4 2,4 Sputtering power one intermediate frequency power supply one or two intermediate frequency power supply working methods plc semi-auto control or pc+plc auto control working gas Ar N2 O2C2H2 total power 30KW 35KW 45KW 50KW compress air 0.4~0.8MPa water-cooling system hydraulic pressure/water temperature:≤25°C/≥0.25MPa(user provide for himself)
