This coating equipment applies vacuum magnetic control sputtering technology in the high quality float glass, twinning cathode, intermadiate frequency sputtering technology, equipped with international advancing control system, coating layer SO2/1TO, the whole manufacturing process is automatic and continuous. Main component: 1. Vacuum room: Made if stainless steel, upright, the outwall connects cooling water, the inter wall is equipped with stainless steel baffle. 2. Vacuum system: Can choose diffusion pump system or turbo molecular pump system. 3. Evaporator source: Direct current magnetic control sputtering target, interm ediate frequency magnetic control sputtering target, which are respectively fixed on bothsiedes of vacuum room. 4. Workpiece drying system: Adopts stainless steel tubular heater and soaking plate to assure the heating homogeneity of the substrate. 5. Air inflating system: Gas quality flow meter and pressure automatic director. 6. Electrical control system: Touch screen and PLC control automatically, achieve data display, operation and control of the system through interactive mode. 7. Water cooling system: Cool vacuum room and cathode, there are water pressure protection switch and water flow switch.
