SPEEDFAM LAPPING MACHINE(2001)

Polishing Plate Dia.(拋光板直徑): Ø609.6mm, Pressure Plate Dia.(壓盤直徑): For 18 inches, Polishing Plate Rotation Speed(拋光板旋轉速度): 6~36rpm, Pressure Plate Drive Speed(壓盤驅動速度): 6~36rpm, Oscillation Width(振盪寬度):Max.520mm, Oscillation Speed(振盪速度):5~30mm/sec, Pressure Plate Forward/Backward Stroke(壓盤行程): 75mm, Pressure Cylinder Dimensions(壓缸尺寸): Ø100X120st