RTP supply system ..

Ecopia is Heat-Treatment System is new concept of adopted PG/PBN electrostatic heater system that combining small-sized ceramic heater, electricity conduction ceramics PG(Pyrolytic Graphite) and electricity insulation ceramics PBN (Pyrolytic Boron Nitride).It is a convenient and useful system that can perform high efficiency,small capacity and high speed responsiveness of small RTA(Rapid Thermal Anneal) by short time of temp rising(1000/10sec) , providing uniform temp on surface.