| Ecopia is Heat-Treatment System is new concept of adopted PG/PBN electrostatic heater system that combining small-sized ceramic heater, electricity conduction ceramics PG(Pyrolytic Graphite) and electricity insulation ceramics PBN (Pyrolytic Boron Nitride).It is a convenient and useful system that can perform high efficiency,small capacity and high speed responsiveness of small RTA(Rapid Thermal Anneal) by short time of temp rising(1000/10sec) , providing uniform temp on surface.Product Feature1) Temperature : Max. 1500 in vacuum chamber2) Max 400 at the air.3) Pressure : torr(Ultimate Pressure within minutes by small chamber)4) PG / PBN Spec : 1300 watt, 220V, 15-25 Ohm, 15 A(max.)Product Specification ModelsRTA-1000ApplicationIt is used for rapidly heating semiconductor samples, in electrical & electronic dept, material, physics and etc, for lab and industry. | 
