Stainless Steel Plating System(LH-) characteristics: 1. A vacuum magnetron sputtering equipment, twin cathode, if sputtering technology, and printed advanced control systems. 2. The production process all automated, continuous. Plating workpiece temperature was up to 350, adjustable temperature control district, 3. Vacuum chamber materials used sus304, polishing a vacuum chamber wall with a wall spray polishing beads processing. 4. Between the vacuum chamber separated by an independent lord, we have designed the valve plates can be effectively cut off, and stability of gas. Only domestic companies have the technology we have designed and manufactured valve plates, which domestic generic than the current flap valve sealing effect of better and more durable. 5. Used magnetic drive to protect the stability of transmission. The entire production line of the paragraph using vvvf speed motor drive, adjustable speed 6. Electrical control systems: Membrane touch screen and PLC automatic control, man-machine dialogue to achieve the data show that the operation and control 7. Main technical parameters: 8. Vacuum pressure limit: 7 x10-4pa September, the average production cycle: 8 0 sec / - 9. Substrate-size: 8 5 0 x 1 5 0 0 (mm) (can be customized on request) 10. Uniformity of the film: More or less 2% 11. The film stability: Meet international standards.ModeDimension LH-800 LH-1000 LH-1250 800*1000mm 1000*1000mm 1000*1000mm Coating mode and main confirguration Eight multi-arc targets Ten multi-arc targets Twelve multi-arc targets Power source Electric-arc power, Filament power, Pulsed bias power supply Process gas control Mass flowmeter + Electromagnetic ceramic valve Vacuum chamber structure Vertical side opening door, pump system postposition, double water cooling Vacuum system Molecule pump +Roots pump +Mechanical pump(5.0*10 -5 Pa)Diffusion pump +Roots pump +Mechanical pump(5.0*10 -4 Pa) Workpiece baking temperature Normal temperature to 350 centi-degree PID control, radiation heating. Workpiece motion mode Public rotation Frequency control: 0-20 rotation per minute Measure mode Number display composite vacuum gauge: from atmosphere to 1.0*10 -5 Pa Control mode Manual/Automatic/PC/PLC + HMI/PC four choice of control mode Remark We can design the dimension of the equipment according to customer’s special technique requirement.
