Magnetron sputtering coating machine has the features of fast deposition rate, great ionization rate, big ion energy, easy operation, low cost, large productive capacity, etc. MF Magnetron Sputtering Coating Machine can be used to coat metal film, TiN, TiC, ZrN, CrN, Ti, Ni, Cr, Cu and other compounds film, multi-layer super-hard film, nitrogen-doped titanium film and the alloy film, and in a very short time to complete all the machining process, it is a highly efficient multi-functional coating equipment. MF Magnetron Sputtering Coating Machine is widely used in the fields of ultra-hard coating about the tools and mould, decorative coating about car wheels, ceramics, golf, watches making, hotel product, sanitary ware, luminaires, optical frame, hardware, etc. Technical parameter: Dimension 800*1000mm / 1100*1000mm / 1250*1500mm power source Electric-arc power, Filament power, Pulsed bias power supply Process gas control Mass flowmeter+Electromagnetic ceramic valve Vacuum chamber structure Vertical side opening door, pump system postposition, double water cooling Vacuum system Molecule pump+Root pump+Mechanical pump(5.0*10-5Pa) Diffusion pump+Root pump+Mechanical pump(5.0*10-4Pa) Workpiece baking temperature Normal temperature to 350 centi-degree PID control, radiation heating Workpiece motion mode Public rotation frequency control: 0-20 rotation per minute Measure mode Number display comosite vacuum gause: from atmosphere to 1.0*10-5Pa Control mode Manual/Automatic/PC/PLC+HMI/PC four choice of control mode Remark we can design the dimension of the vacuum equipment according to customer’ s special technique requirement.
